abdelyamine | 2 Dec 2006 15:50
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Re: Re: Trying to Study Diffusion profile

To do good profile of diffusion you need to do an ionique implantation.

Summary of Ion Implantation:

          Dope semiconductor

          Better doping method than diffusion

          Easy to control junction depth (by ion energy) and dopant
concentration ( by ion current and implantation time).

          Anisotropic dopant profile.

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Gmane