RE: silicon nitride bridges and cantilevers

You don't want to be too loud if you're new to micromachinign:)

-----Original Message-----

Hi all, i'm quietly new to silicon micromachinign.
i want to realize silicon nitride cantilevers and beams.
After silicon nitride pattering, i've tried to release cantilevers and
membranes using KOH underetch. All bridges and cantilever were lost:
during the underetch, they become thinner and thinner...
Which could be the problem ?

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe: 
http://mail.mems-exchange.org/mailman/listinfo/mems-talk