RE: silicon nitride bridges and cantilevers

Hello,
nitride thickness is 70nm, cantilever size ranges from 300x50 um to 500x50
um (length x width). It seams both sizes are more that 10 times silicon
nitride thickness. Any other idea ?

Best regards,
Andrea Mazzolari

> Andrea,
> If the cantilever base is does not have a diameter ~10 times or more than
> the nitride thickness they will lift off. Id the base is large enough, and
> oxide will remain at the center.
> shay
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